System-Level Modelling and Simulation of a Multiphysical Kick and Catch Actuator System

This paper presents a system-level model of microsystem architecture deploying cooperating microactuators. An assembly piezoelectric kick-actuator and an electromagnetic catch-actuator manipulates structurally unconnected, magnetized micromirror. The absence mechanical connections allows for large deflections multistability. Closed-loop feedback control this setup to achieve high accuracy, but requires fast precise models each component. Such can be generated directly from large-scale finite element (FE) via mathematical methods order reduction (MOR). A special challenge lies in reducing nonlinear multiphysical FE its contact micromirror, which is modeled as rigid body. We propose separate the actuator–micromirror system into two single-body systems. step us apply contact-induced forces inputs sub-system and, thus, avoid model. Rather, we have linear with input, established MOR applied. Comparisons between reference reduced demonstrate feasibility proposed methodology. Finally, simulation whole assembly, including actuators, micromirror simple circuitry, presented.